![]() ![]() ![]() Sensors are one of the important components of today’s digital World. is designed using Micromachining Process. is designed using IC Fabrication Process while the mechanical system, which consists of Gears, Cranks, Bearings etc. The electronic system, which consists of the signal processing circuits like Amplifier, ADC, Filters etc. The active components are the Sensors and Actuators while the passive components are the passive electronic systems and passive mechanical systems. The size of these MEMS Based devices is usually in the order of few micrometers (between 1 to 100 micrometers).Īnother important point to remember is that MEMS is an integration of both active and passive components into a single silicon substrate with the help of advanced IC manufacturing technology. ![]() Using traditional IC Technology, you can only fabricate conductors, insulators, diodes and transistors. The main difference between the traditional IC Manufacturing technology (VLSI) and MEMS is that using MEMS you can not only fabricate electrical components like Capacitors and Inductors but also mechanical components like gears, springs, beams etc. The MEMS technology is considered to be an extended form of traditional integrated circuit (IC) manufacturing. In other words, MEMS are microscopic integrated devices that are a combination of electronics, electrical and mechanical elements, all working together for a single functional requirement using a technology called Microsystems Technology (MST). It is a technology associated with manufacturing of microscale devices like Sensors, Transducers, Actuators, Gears, Pumps, Switches etc. MEMS is short for Micro Electro Mechanical Systems. ![]()
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